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  • 產品名稱:1100℃雙管三溫區管式爐(石墨烯生長)- GSL-1100X-III-D11-8

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1100℃雙管三溫區管式爐(石墨烯生長)- GSL-1100X-III-D11-8 GSL-1100X-III-D11-8 is adual tube & three zone tube furnace with 11" + 8.5" O.D two quartz tubes, vacuum flanges&valvessndvacuumgauge for immediate use
詳情介紹:

1100℃雙管三溫區管式爐(石墨烯生長)- GSL-1100X-III-D11-8
GSL-1100X-III-D11-8  is adual tube & three zone tube furnace with 11" + 8.5" O.D two quartz tubes, vacuum flanges & valves snd vacuum gauge for immediate use. Three 30 segments programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. This new furence  is used for growwing graphene film on metallic foil which is wrapped on the wall of inside tube.

 Specifications:
 

Dual quartz tube structure
 
·                                 High purity quart tube
·                                 Outside tube Size: 279 O.D x 269 I.D x 1300mm Length (11" O.D x 10.6" I.D x 48" L), two end opened and connected flange
·                                 Inside tube size :  216 OD x 206 IDx 750 mm Length (8.5"OD x 8.1"ID x30"L), one end closed and connected to gas inlet and outlet.
·                                  Please click picture below to see dual tubes anf flange set-up
·                                
 
Furnace structure
·                                 Double layer steel casing with air cooling.  Surface temperature of case is < 70°C.
·                                 Refractory fibrous alumina insulation liner for maximum energy saving.
·                                 Heating element: NiCrAl Resistance Wire
·                                 Two quartz block are included to  blco heat radiation
·                                 If take inside tube out is furnace also  can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below
·                                                                        
Heating zone
Total heating zone length 900 mm (36")
Three zones: 300 mm + 300 mm + 300mm (12" per zone)
Constant temperature zone: 500 mm (if three zones are in the same temperature)
Working temperature
Max heating temperature: 1100°C ( < 1 hour )
Normal working temperature: 200~1000°C
Max heating & cooling rate: 10°C/min

Temperature uniformity: please click the pic to enlarge
Temperature control
·                                 Three digital controllers with PID/self-tuning functions and 30 segments programmable.
·                                 Thermocouple: three K type thermocouples (one for each zone)
Control accuracy: +/- 1°C
·                                 SRC (Silicon Controlled Rectifier) power control 
·                                 Software for PC control is available as optional 
 
Vacuum sealing & Flange
 
 
 
 
·                                 A pair of stainless steel vacuum sealing flange with high temp-resistance silicon O-ring which can achieve the vacuum rate of 10^-2 torr via heavy duty mechanical pump.
·                                 Left Side Flange:  CVD gas Inlet port and  cooling gas in&out port are included
·                                 Right Side Flange: KF40 vacuum port  with KF-40 Vacuum Right-Angle Valve  for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need a adapter KF40-KF25.
Rated Voltage
Single Phase, 220V AC, 50/60 Hz
AWG 8# Power cord is included (without plug)
Power consumption
Max. 8KW (50A breaker required)
Product Dimension
1300 L x 623 W x 940 H mm (51" L x 24.5" W x 37" H) (without the vacuum flange)
1670 L x 623 W x 940 H mm (66" L x 24.5" W x 37" H) (with the vacuum flange and right angle valve)
Net weight
200kg
Shipping dimension
70" x 70" x 65"
Shipping weight
500Lbs (227kg)
Warranty
One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
You may order replacment quartz tube at the link below
Certificate
 (click to view  the authorized document)
國家**
**名稱:一種真空管式爐
**編號:ZL-2011-2-0102249.4
尊重**、鄙視抄襲、侵權必究
NOTE
In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature before use, please click here to learn
How to set up ceramic tube and vacuum flange for MTI Tube furnace

 
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